| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology for reducing possibility that a crack is generated in a sensor element while forming a lead part finer than an electrode part in the sensor element. <P>SOLUTION: A sensor element has: a planar solid electrolyte layer extending in the longitudinal direction; an electrode part provided on the solid electrolyte layer at the tip side of the longitudinal direction; a lead part electrically connected to the electrode part and extending to the rear end side of the longitudinal direction; and an insulating layer provided on the solid electrolyte layer. The lead part is provided on the solid electrolyte layer on both sides of the insulating layer, and is a layer finer than that of the electrode part. In addition, the rear end side of the electrode part has a connection part provided on the insulating layer, and overlapped with the lead part. In addition, for the longitudinal direction, the tip of the lead part is arranged at the same position as that of the tip of the insulating layer, or at a position on the rear end side of the tip of the insulating layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
