| 摘要 |
<P>PROBLEM TO BE SOLVED: To miniaturize the size of an ozone generating apparatus, and to reform to an easy production method having inexpensive production cost. <P>SOLUTION: This ozone generating apparatus includes a glass substrate 2 and driving electrodes 3A, 3B. The glass substrate 2 is formed so that an opening part used as discharge spaces 2A, 2B, 2C is arrayed in the in-plane direction of the main surface. The driving electrodes 3A, 3B are electrodes filled in the opening part, and are arranged oppositely across the discharge spaces 2A, 2B, 2C, and the driving voltage is applied thereto. Hereby, dielectric barrier discharge is generated in the discharge spaces 2A, 2B, 2C, to thereby generate ozone. <P>COPYRIGHT: (C)2012,JPO&INPIT |
