| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an infrared gas sensor which has a simple structure, is capable of rapid heating, and is superior in corrosion resistance of a heater. <P>SOLUTION: An infrared gas sensor 1 includes an infrared light source part 11, a gas circulation part 13, and an infrared light receiving part 15. In the infrared gas sensor 1, the amount of infrared rays absorbed by a gas to be measured in the gas circulation part 13, out of infrared rays radiated from the infrared light source part 11, is detected by the infrared light receiving part 15, and a concentration of a component gas included in the gas to be measured is measured. The infrared gas sensor includes a ceramic structure 131 which constitutes an internal space X of the circulation part 13 and has a ventilation part 133 allowing the gas to be measured to be circulated between the internal space X and an outside atmosphere Y, and the structure 131 includes a heater pattern 141 buried in a wall 132 constituting the structure 131. <P>COPYRIGHT: (C)2012,JPO&INPIT |
