发明名称 LIGHT TREATMENT APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a light treatment apparatus in which the breakage of an excimer lamp by the movement of an optical radiation unit can be prevented, and that can reliably perform expected ultraviolet irradiation treatment. <P>SOLUTION: The light treatment apparatus includes: a light radiation unit configured by disposing a long excimer lamp in the inside of a casing; and a light radiation unit-moving mechanism making the light radiation unit perform reciprocating horizontal movement to be able to approach and retreat to a light treating region, wherein both ends in the longitudinal direction of the excimer lamp is fixed to the casing in the condition in which the longitudinal direction agrees with the moving direction of the light radiation unit. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012176339(A) 申请公布日期 2012.09.13
申请号 JP20110039462 申请日期 2011.02.25
申请人 USHIO INC 发明人 YOSHIHARA KEITA;SHIMONAKA MASATOSHI;NAKAJIMA AKINOBU
分类号 B08B7/00;B29C59/02;H01L21/027 主分类号 B08B7/00
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