发明名称 SEMICONDUCTOR STRUCTURE HAVING A CAPACITOR AND METAL WIRING INTEGRATED IN A SAME DIELECTRIC LAYER
摘要 Semiconductor structures having capacitors and metal wiring integrated in a same dielectric layer are described. For example, a semiconductor structure includes a plurality of semiconductor devices disposed in or above a substrate. One or more dielectric layers are disposed above the plurality of semiconductor devices. Metal wiring is disposed in each of the dielectric layers. The metal wiring is electrically coupled to one or more of the semiconductor devices. A metal-insulator-metal (MIM) capacitor is disposed in one of the dielectric layers, adjacent to the metal wiring of the at least one of the dielectric layers. The MIM capacitor is electrically coupled to one or more of the semiconductor devices.
申请公布号 WO2012121766(A1) 申请公布日期 2012.09.13
申请号 WO2011US63413 申请日期 2011.12.06
申请人 INTEL CORPORATION;LINDERT, NICK 发明人 LINDERT, NICK
分类号 H01L27/108;H01L21/8247 主分类号 H01L27/108
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