METHOD FOR MANUFACTURING A SUBSTRATE INCLUDING ORGANISED METAL ISLANDS

摘要

The invention relates to a method for manufacturing a substrate including organised islands consisting of a metal such as Ni, Pt, Ir, or Pd, suitable for the controlled growth of nanowires/nanotubes, said method including the following steps: forming a layer of the metal on an exposed top surface of silicon; carrying out annealing in order to completely convert the metal layer into a layer of a silicide of said metal; exposing the top surface to a low-temperature oxygen plasma in order to form an oxysilicide of the metal; and exposing the top surface to a low-temperature hydrogen plasma, which results in obtaining grains of the metal in a silicon oxide layer.