| 摘要 |
<p>The present invention makes it possible, even when using an ordinary electron-beam device (not an environment-controlled electron-beam device), to implement localized vacuum-quality reduction near a sample and cooling of said sample by means of a sample holder alone, without modifying the device or adding equipment such as a chemical cylinder. The sample to be observed is placed in a sample holder provided with: a container that can contain a substance to serve as a gas source; and a through-hole in the bottom of a sample mount on said container. Via said through-hole, gas evaporating or volatilizing from the container is supplied to the sample being observed, thereby forming a localized low-vacuum state at or near the sample. Also, the heat of vaporization required for volatilization can be used to cool the sample.</p> |
