发明名称 SEMICONDUCTOR DEVICE AND FABRICATING METHOD THEREOF
摘要 PURPOSE: A semiconductor device and a manufacturing method thereof are provided to improve reliability and accuracy of a process by forming a metal layer on a lower portion of a glass wafer in an initial step of the process. CONSTITUTION: A semiconductor substrate(110) comprises an upper side(111) and a lower side(112). A metal layer(120) is formed on a lower portion of the semiconductor substrate. A first dielectric layer(130) is formed on a passivation layer(114) into a predetermined thickness. A second dielectric layer(150) is formed on the first dielectric layer into the predetermined thickness. An UBM layer(160) is formed on a land(141) exposed through a second opening(151) of the second dielectric layer.
申请公布号 KR20120101258(A) 申请公布日期 2012.09.13
申请号 KR20110019402 申请日期 2011.03.04
申请人 AMKOR TECHNOLOGY KOREA, INC. 发明人 JUNG, JONG DAE;KIM, BAE YONG
分类号 H01L23/48;H01L21/60 主分类号 H01L23/48
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