摘要 |
In order to be able to prevent analysis accuracy from being reduced by the back flow of sample gas into a cell from the dead volume in a cleaning mechanism during analysis, a gas analysis device (100) is provided with a cell (21) into which the sample gas is introduced, analysis units (22, 23) for analyzing the sample gas introduced into the cell (21), a gas port (91) disposed toward a predetermined region on a gas interface in the cell, and a piping mechanism (92) for connecting the gas port (91) to a predetermined purge gas source (93), a purge gas being blown from the gas port to the predetermined region during a purging operation for cleaning the gas interface, wherein the gas analysis device is further equipped with a switching unit (94) for switching the connection destination of the piping mechanism (92) from the purge gas source to a predetermined suction unit (24), and the gas port (92) is connected to the suction source (24) during introduction or analysis of the sample gas. |
申请人 |
HORIBA, LTD.;NAKATANI, SHIGERU;HARA, KENJI;RAHMAN, MONTAJIR;NAKANE, MASAHIRO |
发明人 |
NAKATANI, SHIGERU;HARA, KENJI;RAHMAN, MONTAJIR;NAKANE, MASAHIRO |