发明名称 |
DEFECT REVIEW SUPPORT DEVICE, DEFECT REVIEW DEVICE AND INSPECTION SUPPORT DEVICE |
摘要 |
To reduce the time taken to prepare a defect review report and to thereby improve the convenience of a defect review device or for an inspection system user. The above object is attained by implementing a review report preparation tool having a function to edit the layout of a review report in a data processing terminal.
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申请公布号 |
US2012233542(A1) |
申请公布日期 |
2012.09.13 |
申请号 |
US201013391313 |
申请日期 |
2010.06.23 |
申请人 |
FUNAKOSHI TOMOHIRO;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
FUNAKOSHI TOMOHIRO |
分类号 |
G06F17/00 |
主分类号 |
G06F17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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