VAPOR-DEPOSITION SHEET, VAPOR-DEPOSITION DEVICE, AND METHOD FOR MANUFACTURING VAPOR-DEPOSITION SHEET

摘要

A vapor-deposition sheet (S) used in a vapor-deposition device (10) that forms a thin film on a substrate (K) inside a vacuum vessel (1) via vapor deposition. The vapor-deposition sheet (S) is configured to include a coating layer (S2) provided on a sheet base (S1), said coating layer (S2) comprising a mixture of two or more types of evaporation materials having different vapor pressures. This allows stable, uniform vapor deposition over a long period of time of two or more types of evaporation materials having different vapor pressures without degradation of said materials.