| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a hydrostatic water bearing linear guide device, with which pitching is extremely small during the movement of a table. <P>SOLUTION: This hydrostatic water bearing linear guide device 1 is configured so that a magnetic balancer 300 is attached, through a nonmagnetic body support plate, to at least either the front side and/or the rear side of the bottom surface of the table 31 so as to face a coil 24 provided to a guide way 2. <P>COPYRIGHT: (C)2012,JPO&INPIT |
