发明名称 LIGHT TREATMENT APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a light treatment apparatus that can efficiently perform expected ultraviolet irradiation treatment. <P>SOLUTION: The light treatment apparatus includes: a light radiation unit configured by disposing an excimer lamp and a pressure rising transformer for lighting the excimer lamp, in the inside of a casing; and a light radiation unit-moving mechanism making the light radiation unit perform reciprocating horizontal movement to be able to approach and retreat to a light treating region, wherein the excimer lamp and the pressure rising transformer are arranged in the casing inside in the light radiation unit such that the excimer lamp is positioned at the front side and the pressure rising transformer is positioned at the rear side in the approach direction to the light treating region. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012176340(A) 申请公布日期 2012.09.13
申请号 JP20110039463 申请日期 2011.02.25
申请人 USHIO INC 发明人 YOSHIHARA KEITA;SHIMONAKA MASATOSHI;NAKAJIMA AKINOBU
分类号 B08B7/00;B29C59/02;H01L21/027 主分类号 B08B7/00
代理机构 代理人
主权项
地址