发明名称 |
METHOD OF TREATING AN OXIDIZED LAYER OF METAL NITRIDE |
摘要 |
The present arrangement provides a method of treating an oxidized layer of metal nitride, including oxidizing a layer (2) of metal oxide at the surface of a first layer (1) of nitride of said metal using a plasma of an oxidizing species with an oxidation number that is greater than that of oxygen in order to form a metallic layer (3) of a compound based on said metal; and reducing the metallic layer (3) formed in step i) using a plasma of hydrogen and nitrogen to form a second layer (4) of nitride of said metal.
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申请公布号 |
US2012228642(A1) |
申请公布日期 |
2012.09.13 |
申请号 |
US201213408172 |
申请日期 |
2012.02.29 |
申请人 |
AUBE MICHEL;DE PERSON PIERRE |
发明人 |
AUBE MICHEL;DE PERSON PIERRE |
分类号 |
H01L33/02;B05D3/10 |
主分类号 |
H01L33/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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