DYNAMIC GAS BLENDING

摘要

A dynamic gas blending method for adjusting a concentration of an off -spec gas mixture to a target concentration, comprising the steps of : recycling the off -spec gas mixture upstream of a mixer, wherein the off -spec gas mixture includes a gaseous component at an off -spec concentration; regulating a flow rate of an active gas using a first flow control device, wherein the active gas includes the gaseous component at a concentration greater than the off -spec concentration; regulating a flow rate of a balance gas using a second flow control device, and re-blending the off-spec gas mixture with the active and the balance gases to create a resultant mixture at the target concentration.