发明名称 SHEET PASTING APPARATUS AND PASTING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a sheet pasting apparatus and pasting method in which, when pasting an adhesive sheet, deflection of a body to paste the adhesive sheet thereon can be suppressed and a pasting defect of the adhesive sheet or damage on the body to paste the adhesive sheet thereon can be prevented. <P>SOLUTION: A sheet pasting apparatus 1 comprises supporting means 2 which supports a body W to paste an adhesive sheet thereon, sheet supplying means 3 which is capable of supplying the adhesive sheet S to the position facing the body W to paste the adhesive sheet thereon supported by the supporting means 2, and pressing means 8A and 8B which pressing and pasting the adhesive sheet S on the body W to paste the adhesive sheet thereon. The supporting means 2 includes a first supporting section 21 which is abutted to one surface W1 of the body W to paste the adhesive sheet thereon and supports an outer edge region W3 of the body W to paste the adhesive sheet thereon, and a second supporting section 23 which is abutted to another surface of the body W to paste the adhesive sheet thereon and holds the outer edge region W3 of the body W to paste the adhesive sheet thereon with the first supporting section. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012178471(A) 申请公布日期 2012.09.13
申请号 JP20110040871 申请日期 2011.02.25
申请人 LINTEC CORP 发明人 NAKADA MIKI;SUGISHITA YOSHIAKI
分类号 H01L21/683;H01L21/301 主分类号 H01L21/683
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