METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATING REED, APPARATUS OF MANUFACTURING PIEZOELECTRIC VIBRATING REED, PIEZOELECTRIC VIBRATING REED, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO-CONTROLLED TIMEPIECE

摘要

A photoresist film forming process through a spin coating method is included, the photoresist film forming process is performed by rotating a square wafer, a spin chuck is provided with a column portion, a penetration hole through which the column portion penetrates is formed in a flow regulating plate, a plurality of blowing holes blowing gas toward a second surface of a square wafer are provided in the upper surface of the flow regulating plate at the inner side in relation to the outer edge of the square wafer in the radial direction of the wafer maintaining portion and at the outer side in relation to the inner circumferential surface of the penetration hole in a radial direction of the wafer maintaining portion.