发明名称 |
SINGLE WAFER FABRICATION PROCESS FOR WAVELENGTH DEPENDENT REFLECTANCE FOR LINEAR OPTICAL SERIALIZATION OF ACCELEROMETERS |
摘要 |
A plurality of Fabry-Perot interferometric sensors are optically coupled in series with each other to form an ordered optical series. Each Fabry-Perot interferometric sensor has a unique signalband and a passband. Each Fabry-Perot interferometric sensor has its unique signalband within the passbands of all of the next higher ordered Fabry-Perot interferometric sensors in the optical series so that a corresponding unique fringe signal from each of the Fabry-Perot interferometric sensors is a multiplexed output from the optical series. |
申请公布号 |
US2012231570(A1) |
申请公布日期 |
2012.09.13 |
申请号 |
US201213467876 |
申请日期 |
2012.05.09 |
申请人 |
PEREZ MAXIMILLIAN A.;SHKEL ANDREI A.;THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
发明人 |
PEREZ MAXIMILLIAN A.;SHKEL ANDREI A. |
分类号 |
H01L31/18 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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