发明名称 |
ENERGY-SAVING SILENCER ASSEMBLY, A SEMICONDUCTOR MANUFACTURING VACUUM PUMP WITH SAME AND METHOD FOR HEATING NITROGEN GAS |
摘要 |
The present invention pertains to an energy-saving silencer assembly, a semiconductor manufacturing vacuum pump with the same and a method for heating nitrogen gas. Nitrogen gas is heated using the high temperature of the surface of a silencer and supplied to the inside of the silencer so as to resolve blockage problems due to the solidification of reaction by-products while saving energy costs due to the use of additional heat sources. The energy-saving silencer assembly in the present invention as above includes: a silencer connected to a discharge side of a pump section, which pumps reaction by-product gas into a vacuum pump, so as to pass the pumped reaction by-product gas from a rear end portion to a front end portion; an outer pipe surrounding the outer peripheral surface of the silencer at an interval so as to provide a heating space between the silencer and the outer pipe; a nitrogen gas supply section for supplying nitrogen gas to the heating space; and a nitrogen gas injection section for injecting heated nitrogen gas to the inside of the silencer by the contact with the outer peripheral surface of the silencer in the heating space. |
申请公布号 |
WO2012093802(A3) |
申请公布日期 |
2012.09.13 |
申请号 |
WO2011KR10229 |
申请日期 |
2011.12.28 |
申请人 |
J-SOLUTION CO., LTD.;LEE, SEUNG YONG |
发明人 |
LEE, SEUNG YONG |
分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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