| 摘要 |
<p>This sensor chip has a diaphragm, which includes a first surface, and a second surface that faces the first surface, and which has formed therein a plurality of through holes that penetrate the first surface and the second surface. The diaphragm has lower mechanical strength with respect to stress applied from the specific direction, compared with mechanical strength with respect to stress applied from other directions. The through holes have a first through hole and a second through hole that is closest to the first through hole. The direction along a first line segment that connects the center of the first through hole and the center of the second through hole is different from the specific direction.</p> |
