MULTILAYER SUBSTRATE, MANUFACTURING METHOD FOR MULTILAYER SUBSTRATE, AND QUALITY CONTROL METHOD FOR MULTILAYER SUBSTRATE

摘要

The present invention pertains to a multilayer substrate having a substrate and a multilayer film disposed thereon, wherein recessed or protruding reference marks indicating a reference position of the multilayer substrate are formed on the surface of the multilayer film that is opposite the substrate-side surface, and at least a portion of the material of the surface of the reference marks is different from the material of an outermost surface layer that is on the side opposite the substrate side of the multilayer film.