发明名称 |
METHOD FOR FORMING A COMPOUND SEMI-CONDUCTOR THIN-FILM |
摘要 |
A method is provided for fabricating a thin film semiconductor device. The method includes providing a plurality of raw semiconductor materials. The raw semiconductor materials undergo a pre-reacting process to form a homogeneous compound semiconductor target material. The compound semiconductor target material is deposited onto a substrate to form a thin film having a composition substantially the same as a composition of the compound semiconductor target material.
|
申请公布号 |
US2012228731(A1) |
申请公布日期 |
2012.09.13 |
申请号 |
US201213478851 |
申请日期 |
2012.05.23 |
申请人 |
BRUCE ALLAN JAMES;FROLOV SERGEY;CYRUS MICHAEL;SUNLIGHT PHOTONICS INC. |
发明人 |
BRUCE ALLAN JAMES;FROLOV SERGEY;CYRUS MICHAEL |
分类号 |
H01L31/032;H01L31/0296;H01L31/18 |
主分类号 |
H01L31/032 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|