摘要 |
[Problem] To provide a pump device with which the performance of a diaphragm can be stabilized. [Solution] A pump device having a drive member one end of which is connected to a diaphragm and the other end of which is connected to a drive mechanism, with the end on the drive mechanism side repeating a reciprocating movement in a first axial direction and oscillation in a second axial direction. In conjunction therewith the one end on the diaphragm side executes a reciprocating movement in the first axial direction, so there is a problem in that the diaphragm deteriorates in the direction in which it is easily stretched - for example, in the second axial direction in which oscillation occurs - and the diaphragm is easily broken. Therefore, the diaphragm can be strengthened in the second axial direction and durability can be improved by embedding a base cloth having fibers that extend in the second axial direction. Furthermore, by providing an indicator part that indicates the second axial direction, the direction of extension of the fibers of the base cloth embedded in the diaphragm can be recognized, making it easy to arrange the diaphragm in the desired direction in the pump main body when the pump device is being assembled. |
申请人 |
ULVAC KIKO, INC.;NONOMURA, YUJI;ITOYAMA, RYUJI;OSAKA, TSUNEO |
发明人 |
NONOMURA, YUJI;ITOYAMA, RYUJI;OSAKA, TSUNEO |