| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for connecting nano-objects to external electrical systems, and method for producing the device. <P>SOLUTION: According to the invention, which is applied in particular to molecular characterization, a device including the following is produced: an upper layer (16) equipped with upper contact pads (8) connected to a nano-object (2); a lower layer (18) equipped with lower contact pads (12) connected to an external electrical system (4); a bonding layer (20) above the lower layer, including electrical through-vias (22) in contact with the lower pads; and at least two layers (22, 24) between the bonding layer and the upper layer, equipped with conductive lines (25) and electrical vias (26) for connecting the upper pads to the lower pads. <P>COPYRIGHT: (C)2012,JPO&INPIT |
