| 摘要 |
<P>PROBLEM TO BE SOLVED: To allow a gap between an X-ray incident surface of a sample and an X-ray shielding member to be adjusted in accordance with change in width of incident X-rays when an incident angle θ of X-rays to the sample is changed. <P>SOLUTION: An X-ray shielding member 20 is provided in a position facing an X-ray incident surface So of a sample S, and a gap which incident X-rays radiated from an X-ray source 1 and irradiating the X-ray incident surface So of the sample can pass through is formed between the X-ray shielding member 20 and the X-ray incident surface So of the sample, Furthermore, a gap adjusting mechanism 21 for moving the X-ray shielding member 20 is provided, and the X-ray shielding member 20 is moved in accordance with the change of an X-ray incident angle to the sample S due to a goniometer, whereby spread of the gap between the X-ray shielding member 20 and the X-ray incident surface of the sample S can be adjusted. <P>COPYRIGHT: (C)2012,JPO&INPIT |
