| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element whose reliability is improved by suppressing the occurrence of a crack in a piezoelectric film, a manufacturing method thereof, and a head gimbal assembly mounted with the piezoelectric element. <P>SOLUTION: In a piezoelectric actuator 40 relating to this invention, a boundary B between a first protective film 314 and a second protective film 315 on the protective film 314 formed in one direction of a piezoelectric part 310 is in the shape of a circular arc, and the entire boundary is a curved part. In the case that the boundary B has the curved part in this way, when the piezoelectric actuator 40 is handled, for example, when the piezoelectric actuator 40 is mounted on a suspension 22, the concentration of bending stress near the boundary B is relaxed in comparison with when the boundary B is in the shape of a straight line. In the result, the damage of a piezoelectric film 311 near the boundary B is significantly reduced to suppress the occurrence of a crack so that the reliability of the piezoelectric actuator 40 can be improved. <P>COPYRIGHT: (C)2012,JPO&INPIT |
