| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a physical quantity sensor with high measurement accuracy. <P>SOLUTION: A physical quantity sensor of the present invention is capacitance detection type containing: a supporting substrate 20; fixed electrode fingers 38 and 39 fixed on the supporting substrate; and movable electrode fingers 36 and 37 facing the fixed electrode fingers and displacing according to applied physical quantity. One surface of the fixed electrode fingers 38 and 39 are fixed to the supporting substrate 20. <P>COPYRIGHT: (C)2012,JPO&INPIT |
