| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a deformation analysis method and a deformation analysis device under the consideration of a phenomenon in which a polishing member surface is scraped off due to dressing under polishing. <P>SOLUTION: Disclosed is a deformation analysis method for solving the diffusion of a certain scalar value and deformation due to expansion depending on the scalar value by a computer by using a model expressed with a plurality of fine elements, the deformation analysis method being characterized to analyze the deformation volume of each node in a predetermined time in advance, and perform deformation analysis by defining a shape obtained by subtracting the deformation volume of each node from a node in the original shape as an initial shape. <P>COPYRIGHT: (C)2012,JPO&INPIT |
