| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrolytic treatment device capable of preventing an electrolyte from being retained and of saving the using amount of the electrolyte even when treating a long-sized substrate, and to provide a treatment tank suitably used for the electrolytic treatment device. <P>SOLUTION: The treatment tank 10 includes: a long-sized treatment tank body 11 in which the electrolyte L is housed, a cylindrical substrate A is immersed, and the inner surface 11a' of the bottom 11a of the tank body is bent into a circular arc shape; an electrolyte supply part 12 for supplying the electrolyte L to the treatment tank body 11; and an overflow part 13 for discharging the electrolyte L from the tank body 11. The electrolyte supply part 12 is provided above one side 11b of the tank body 11 along the longitudinal direction of the tank body 11, and the overflow part 13 is provided above the other side 11c of the tank body 11 along the longitudinal direction of the tank body 11. The electrolytic treatment device comprises the treatment tank 10 and an electrode plate immersed in the tank body 11. <P>COPYRIGHT: (C)2012,JPO&INPIT |
