| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately print a pattern of a mask onto a non-magnetic metal plate. <P>SOLUTION: A pattern printing method includes aligning a mask (6) with respect to a non-magnetic metal plate (1) which is hung down vertically, tightly adhering the mask to the non-magnetic metal plate thereafter and irradiating the mask with light from above the mask to print a pattern of the mask on a photo-sensitive film of the non-magnetic metal plate. According to the pattern printing method, during the alignment, a current (I) flows to the non-magnetic metal plate, the non-magnetic metal plate is pulled down with a tensile force (F) generated by the current and a magnetic field of a magnet (18) which is disposed just under the non-magnetic metal plate, the alignment is performed while the tensile force is operating, and thereafter, the mask is tightly adhered to the non-magnetic metal plate. <P>COPYRIGHT: (C)2012,JPO&INPIT |
