| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultraviolet laser device which allows the reduction of manufacturing cost by suppressing the reduction of laser output due to a decomposed organic material by a simple configuration. <P>SOLUTION: An ultraviolet laser device 1 includes a solid-state laser oscillating medium 8 which generates fundamental wave light 21, and an LBO wavelength conversion crystal 10 which receives the fundamental wave light 21 and its secondary harmonic light 22 as incident light and performs wavelength conversion from the incident light to tertiary harmonic light 23 being ultraviolet laser. In the ultraviolet laser device, a reflecting surface 14 which transmits the fundamental wave light 21 and the secondary harmonic light 22 and reflects the tertiary harmonic light 23 is formed in the LBO wavelength conversion crystal 10 so as to be inclined relative to an optical axis A of the fundamental wave light 21 and the second harmonic light 22. <P>COPYRIGHT: (C)2012,JPO&INPIT |
