| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a table apparatus having an irradiation part for irradiating active ray to a function liquid applied to a workpiece which effectively cools platens and reduce the thermal deformation of a recording medium etc. <P>SOLUTION: The table apparatus 40 includes: the platens 7 for supporting the recording medium; through-holes 12 formed at the platens 7; projections 13 formed inside the platens 7; flow paths 8 for passing air introduced from the through-holes 12; and an air suction part 10 for sucking air flowing through the flow paths 8. <P>COPYRIGHT: (C)2012,JPO&INPIT |
