发明名称 |
OXIDE SINTERED BODY, METHOD FOR MANUFACTURING SAME, AND TARGET USING SAME |
摘要 |
<p>Provided are: a target; a method for manufacturing the target; an oxide sintered body that is useful for manufacturing the target; and a method for manufacturing the oxide sintered body; the target making it possible, even if DC sputtering is used, to form at high productivity a zinc-oxide-based transparent electroconductive film having a similar level of electroconductivity as AZO or GZO and exceptional chemical durability. This oxide sintered body substantially comprises zinc, titanium, oxygen, and at least one additional trace element (TE) selected from the group consisting of aluminum, gallium, and indium, the titanium being derived from low-valence titanium oxide represented by the formula TiO2-X (X = 0.1 to 1).</p> |
申请公布号 |
WO2012121298(A1) |
申请公布日期 |
2012.09.13 |
申请号 |
WO2012JP55855 |
申请日期 |
2012.03.07 |
申请人 |
SUMITOMO CHEMICAL COMPANY, LIMITED;NAKATA, KUNIHIKO;HOTTA, SHOHEI |
发明人 |
NAKATA, KUNIHIKO;HOTTA, SHOHEI |
分类号 |
C04B35/453;C23C14/34 |
主分类号 |
C04B35/453 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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