READILY SINTERABLE SILICON CARBIDE POWDER AND SILICON CARBIDE CERAMIC SINTERED BODY

摘要

Provided are a readily sinterable silicon carbide powder which has a substantially stoichiometric composition and from which a fine sintered body is obtained, a silicon carbide ceramic sintered body having low resistivity, and a method for manufacturing the same. In this readily sinterable silicon carbide powder, the carbon/silicon elemental ratio is 0.96 to 1.04, the average particle diameter is 1.0 to 100 µm, and the ratio of the integrated absorption intensity in the chemical shift range of 0 to 30 ppm to the integrated absorption intensity in the range of 0 to 170 ppm is 20% or less in the 13C-NMR spectrum. By sintering the silicon carbide powder under pressure, a fine sintered body can be produced which has low resistivity and high purity.