SURFACE WAVE PLASMA GENERATING ANTENNA AND SURFACE WAVE PLASMA PROCESSING APPARATUS

摘要

PURPOSE: An antenna for generating surface wave plasma and a plasma processing apparatus are provided to form plasma uniformity of a circumferential direction by preventing the reduction of intensity of electromagnetic waves in a region where there is no slot in a slot joint portion. CONSTITUTION: An antenna(81) for generating surface wave plasma has a disc shape. The antenna has six slots(121) which are formed into a circumferential shape. The slots have equal circular arc shapes. The slots have a central portion(121a) forming a thick circular arc shape, a first end portion(121b), and a second end portion(121c). The first end portion is extended from the outside of one circumferential direction end portion on one side of the central portion to a circumferential direction. The second end portion is extended from the inside of the circumference direction end portion on the other side of the central portion to the circumferential direction.