APPARATUS FOR MANUFACTURING POLY SILICON WITH A FUNCTION OF IMPROVED POWDER COLLECTION IN CHAMBER OF THE BELL-JAR TYPE REACTOR

摘要

PURPOSE: A polysilicon manufacturing apparatus with the enhanced function for collecting powder in a bell type reactor is provided to effectively collect powder generated from a polysilicon manufacturing process by using monosilane as raw silane gas. CONSTITUTION: A polysilicon manufacturing apparatus includes a bell type reactor, an electrode part, a silicon core rod part, and a pre-heating part. A chamber is arranged in the reactor, and a gas inlet(112) and a gas outlet(114) are formed at the bottom of the chamber. The electrode part penetrates through the lower part of the reactor to the bottom of the chamber. The electrode part includes a first electrode(122) and a second electrode(124). The silicon core rod part pyrolyzes raw gas such that silicon is precipitated on the surface of the silicon core rod part. The pre-heating part pre-heats the silicon core rod part to lower specific resistance until the silicon core rod part is electrical resistance heated. The power collecting part collects power from the chamber.