ROTARY RINSER

摘要

A rotary rinser 1 which injects dual fluids includes a rotary valve 11 in which an admixture of one of the fluids into the other fluid is prevented. A stationary valve member 28 is formed with a chemical liquid supply passage 60 and an air supply passage 48 while a rotary valve member 16 is formed with a chemical liquid discharge passage 18 and an air discharge passage 24. As the rotary valve member 16 rotates, a supply passage and a discharge passage for each fluid move into and out of communication. Sliding surfaces into which the chemical liquid passages 60 and 22a open (sliding surfaces of a chemical liquid stator 34 and a chemical liquid distributor 22) and sliding surfaces through which the air passage 48 and 24 move into and out of communication (sliding surfaces of the rotary valve member 16 and the air distributor 49) are disposed at different radial positions and at different elevations.