VACUUM ISOLATION APPARATUS FOR A HIGH-DEGREE VACUUM SITUATION

摘要

PURPOSE: A vacuum isolation device for a high-degree vacuum situation is provided to prevent grease or micro metal particles from being scattered in spite of the high-degree vacuum situation wherein the grease or micro metal particles are used in a friction portion. CONSTITUTION: Each rod(4) is coupled with each piston. One end of each rod protrudes from each cylinder case. A valve plate(5) is combined with the rods. One end of the bellow(6) is combined with the valve plate. The other end of the bellow is combined with the cylinder case. The bellow surrounds the circumference of the rod which protrudes from the cylinder case.