FLEXIBLE FORCE OR PRESSURE SENSOR ARRAY USING SEMI-CONDUCTOR STRAIN GAUGE WHICH IS ADAPTING CMOS CIRCUIT, FABRICATION METHOD THEREOF AND MEASUREMENT METHOD THEROF

摘要

PURPOSE: Flexible force or a pressure sensor array of a semiconductor strain gauge applying a CMOS(Complementary Metal-Oxide Semiconductor) circuit method, a method for manufacturing the flexible force and the pressure sensor array, and a method for measuring the flexible force or pressure using the flexible force or pressure sensor array are provided to obtain a chemically stable sensor structure. CONSTITUTION: Flexible force or a pressure sensor array of a semiconductor strain gauge applying a CMOS circuit method comprises a circuit board(10) and a pair of elastic polymer layers(20,30). The circuit board comprises a semiconductor strain gauge, a high molecule film layer, a CMOS circuit, first signal lines, second signal lines, and a switch controlling unit. The semiconductor strain gauge comprises a plurality of unit bodies formed into predetermined array patterns, thereby being transformed by pressure or force. The first and second signal lines are connected to the unit bodies and form an electrode and output deformation signals being output by the deformation of each unit body. The switch controlling unit controls a switch and successively scans the second signal lines to make current flow in one of the second signal lines. The elastic polymer layers are formed in both surface of the circuit board so that the circuit board is included into the inside.