| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for generating vacuum arc discharge, thereby generating discharge quickly at a given location on a dielectric material, and detecting a discharge effect on the dielectric material and a region where discharge of the dielectric material is easily generated, or the like. <P>SOLUTION: The method for generating vacuum arc discharge arranges a coupon 2 imitating a dielectric material such as a solar cell and the like within a vacuum chamber 1 imitating a vacuum environment, and brings two needle electrodes 5 into contact which are capable of relative movement to the coupon 2 to generate surface discharge on a surface of the coupon 2 by applying high-voltage pulses between the needle electrodes 5. Further, the method generates a plasma state by the surface discharge arising at a region of the coupon 2, and induces vacuum arc discharge via plasma to the coupon 2. <P>COPYRIGHT: (C)2008,JPO&INPIT |
