发明名称 THIN FILM FOR USE AS REFLECTIVE FILM OR SEMI-TRANSMISSIVE REFLECTIVE FILM, SPUTTERING TARGET AND OPTICAL RECORDING MEDIUM
摘要 <p>A thin film for a reflection film or a semi-transparent reflection film, which has a compound phase comprising at least one selected from the group consisting of a nitride, an oxide, a complex oxide, a nitroxide, a carbide, a sulfide, a chloride, a silicide, a fluoride, a boride, a hydride, a phosphide, a selenide and a telluride of gallium, palladium or copper, dispersed in a matrix formed of silver or a silver alloy. The compound phase in the thin film may include at least one compound selected from the group consisting of nitride, oxide, complex oxide, nitroxide, carbide, sulfide, chloride, silicide, fluoride, boride, hydride, phosphide, selenide and telluride of silver. The thin film of the present invention minimizes the deterioration of the reflectance even after a long period of use, and can prolong the life of various devices which use the thin film as a reflection film, such as an optical recording medium and a display. The thin film can be also applied to a semi-reflective/semi-transparent film used in the optical recording medium.</p>
申请公布号 EP2048524(B1) 申请公布日期 2012.09.12
申请号 EP20060832810 申请日期 2006.11.17
申请人 TANAKA KIKINZOKU KOGYO K.K. 发明人 OBATA, TOMOKAZU;YANAGIHARA, HIROSHI
分类号 G02B5/08;C23C14/34;G02B5/10;G11B7/24;G11B7/24038;G11B7/258;G11B7/259;G11B7/26 主分类号 G02B5/08
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