| 摘要 |
PURPOSE: A method for loading a flexible substrate is provided to prevent a moire pattern from being created on the flexible substrate which is loaded on a boat and processed. CONSTITUTION: A substrate transfer robot(100) transfers a flexible substrate(G) to an upper portion of a perforated table(110). A cylinder(115) installed at the lower of the perforated table supports a lower part of the flexible substrate. An injection hole uniformly formed in the perforated table sprays air to the flexible substrate. An adsorption pad of an absorption transfer robot adsorbs the flexible substrate. The flexible substrate is loaded on a holder which is supported by an arm of a holder transfer robot.
|
