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发明名称
Imaging optical system and exposure apparatus
摘要
申请公布号
EP1742111(B1)
申请公布日期
2012.09.12
申请号
EP20060116721
申请日期
2006.07.06
申请人
CANON KABUSHIKI KAISHA
发明人
SENTOKU, KOICHI;TAKAHASHI, GAKU;INA, HIDEKI;MIWA, YOSHINORI
分类号
G03F7/20;G02B7/00;G02B17/08;G03F9/00
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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