COATED SUBSTRATES AND METHODS OF MAKING SAME

摘要

PURPOSE: A coated substrate is provided to improve abrasion resistance of a substrate by controlling aluminum to titanium atomic percent ratio and oxygen to titanium atomic percent ratio of a coating material comprising titanium oxycarbonitride or titanium aluminum oxycarbonitride. CONSTITUTION: A coated substrate(24) comprsies a coating materail(22). The coating material comprises at least one layer consisting of titanium oxycarbonitride or titanium aluminum oxycarbonitride. oxygen to titanium atomic percent ratio of the layer is 0.01-0.09, and aluminum to titanium atomic percent ratio is 0-0.1. The ratio of young hardness(GPa) to modulus(GPa) of the coating material is at least 0.06. A manufacturing method of a coating substrate comprises: a step of preparing a substrate with a substrate surface, and a step of coating material evaporated on the substrate surface.