| 摘要 |
PURPOSE: A laser processing apparatus is provided to check the contamination of a lens protection cover without removing the lens protection cover from a condenser using a camera unit arranged opposite to the condenser. CONSTITUTION: A laser processing apparatus comprises a chuck table, a laser irradiator, and a processing transfer unit. The laser irradiator includes a generator generating a laser beam and a condenser(31) condensing the laser beam from the generator. The condenser comprises an objective lens(320) concentrating the laser beam on a work piece and a lens protection cover(342) arranged between the objective lens and the work piece to block scrap scattering from the work piece toward the objective lens. A camera unit is arranged opposite to the condenser to detect the contamination of the lens protection cover. [Reference numerals] (71) First memory unit; (72) Second memory unit; (73) Determination unit; (AA) Air |
