发明名称 Semiconductor device and manufacturing method of semiconductor device
摘要 A semiconductor device includes a semiconductor substrate, a lower electrode, a magnetoresistive element, an upper electrode, and a protective film. The lower electrode is formed over the semiconductor substrate. The magnetoresistive element includes a fixed layer, a tunneling insulating film, and a free layer. The upper electrode is disposed over the free layer. The protective film covers the sides intersecting the main surfaces of the lower electrode, the fixed layer, the tunneling insulating film, the free layer, and the upper electrode. The fixed layer, whose magnetization direction is fixed, is disposed over the lower electrode. The tunneling insulating film is disposed over the fixed layer. The free layer, whose magnetization direction is variable, is disposed over a main surface of the tunneling insulating film. The width of the upper electrode is smaller than that of each of the lower electrode and the fixed layer.
申请公布号 US8264023(B2) 申请公布日期 2012.09.11
申请号 US20100971783 申请日期 2010.12.17
申请人 TAKEUCHI YOSUKE;MATSUOKA MASAMICHI;MATSUDA RYOJI;TSUKAMOTO KEISUKE;RENESAS ELECTRONICS CORPORATION 发明人 TAKEUCHI YOSUKE;MATSUOKA MASAMICHI;MATSUDA RYOJI;TSUKAMOTO KEISUKE
分类号 H01L21/02 主分类号 H01L21/02
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