MANIFOLD INTERGRATED WITH QUARTZ TUBE GUIDE RING BY LASER WELDING AND METHOD THEREOF

摘要

PURPOSE: A manifold and a manufacturing method thereof are provided to prevent poor quality of a product due to an installation error of a quartz tube by including a guide unit in a quartz tube seating ring. CONSTITUTION: A quartz tube seating ring(200) is inserted and fixed in a manifold body(100). A flange unit(120) is placed in a peripheral direction of the inner circumferential face of the manifold body. A fitting unit(210) is formed on the outer circumference of the quartz tube seating ring. An empty space between the manifold body and the quartz tube seating ring is filled with a connection piece(300). The quartz tube seating ring and the connection piece are fixed to the manifold body with welding.