发明名称 |
Mass analysis magnet for a ribbon beam |
摘要 |
A ribbon beam mass analyzer having a first and second solenoid coils and steel yoke arrangement. Each of the solenoid coils have a substantially “racetrack” configuration defining a space through which an ion ribbon beam travels. The solenoid coils are spaced apart along the direction of travel of the ribbon beam. Each of the solenoid coils generates a uniform magnetic field to accommodate mass resolution of wide ribbon beams to produce a desired image of ions generated from an ion source. |
申请公布号 |
US8263941(B2) |
申请公布日期 |
2012.09.11 |
申请号 |
US20090616589 |
申请日期 |
2009.11.11 |
申请人 |
BENVENISTE VICTOR;BUFF JAMES S.;SINCLAIR FRANK;OLSON JOSEPH C.;VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
BENVENISTE VICTOR;BUFF JAMES S.;SINCLAIR FRANK;OLSON JOSEPH C. |
分类号 |
H01J49/20 |
主分类号 |
H01J49/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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