发明名称 Mass analysis magnet for a ribbon beam
摘要 A ribbon beam mass analyzer having a first and second solenoid coils and steel yoke arrangement. Each of the solenoid coils have a substantially “racetrack” configuration defining a space through which an ion ribbon beam travels. The solenoid coils are spaced apart along the direction of travel of the ribbon beam. Each of the solenoid coils generates a uniform magnetic field to accommodate mass resolution of wide ribbon beams to produce a desired image of ions generated from an ion source.
申请公布号 US8263941(B2) 申请公布日期 2012.09.11
申请号 US20090616589 申请日期 2009.11.11
申请人 BENVENISTE VICTOR;BUFF JAMES S.;SINCLAIR FRANK;OLSON JOSEPH C.;VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 BENVENISTE VICTOR;BUFF JAMES S.;SINCLAIR FRANK;OLSON JOSEPH C.
分类号 H01J49/20 主分类号 H01J49/20
代理机构 代理人
主权项
地址