IMPROVED MULTICHAMBER SPLIT PROCESSES FOR LED MANUFACTURING,申请号KR20127006990-传众专利搜索

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发明名称	IMPROVED MULTICHAMBER SPLIT PROCESSES FOR LED MANUFACTURING
摘要
申请公布号	KR20120099632(A)	申请公布日期	2012.09.11
申请号	KR20127006990	申请日期	2010.10.04
申请人	APPLIED MATERIALS, INC.	发明人	SU JIE
分类号	H01L21/205;H01L33/02;H01L33/32	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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