| 摘要 |
A magnet unit includes a first magnetic pole (7a), a second magnetic pole (7b) and a third magnetic pole (7c) at a center between the first magnetic pole (7a) and the second magnetic pole (7b), providing an E-shaped configuration. In the magnet unit, a first magnet is defined between the first magnetic pole (7a) and the third magnetic pole (7c) by connecting two electromagnets (71aa, 73aa) with each other through a permanent magnet (72a), while a second magnet is defined between the second magnetic pole (7b) and the third magnetic pole (7c) by connecting two electromagnets (71ba, 73ba) with each other through a permanent magnet (72b). With this configuration, it is possible to reduce a deviation in the length of respective magnetic paths from the permanent magnets (72a, 72b) up to their respective magnetic poles. By controlling exciting currents to the respective electromagnets (71aa, 73aa, 71ba, 73ba), it is also possible to adjust fluxes (or flux density) in respective directions x, y individually. |
